Zirconium Target
Overview
Zirconium Target is widely used in the fields of sputtering coating, semiconductor manufacturing, optical coating, new energy, etc., with its excellent physical and chemical stability, corrosion resistance, high purity controllability, and adaptability to the needs of multiple fields. In the future, with the advancement of technology, its application potential in emerging fields such as nano-coatings and quantum devices will continue to be demonstrated.
Zr Sputtering Target Characteristics
Good high-temperature performance
The melting point of zirconium is as high as 1852℃. It can maintain a stable physical structure in a high-temperature environment and is not easy to melt or deform.
Strong chemical stability
Zirconium can resist corrosion from a variety of strong acids, strong alkalis and seawater at room temperature, and a dense ZrO₂ passivation film is easily formed on the surface to prevent further corrosion.
Excellent electrical and optical properties
Zirconium can conduct electricity and prevent metal ions from diffusing. Zirconium oxide has a high refractive index and can be used to prepare optical coatings.
Strong sputtering performance
The purity can usually reach above 99.5%, and it can deposit highly uniform thin films. It can be made into targets of various shapes through forging, rolling and other processes, and is suitable for different sputtering equipment.
Zirconium Target Dimension
|
Grade |
|
|
Technique |
Hot isostatic pressing, Grain refinement, Sintering, Forging, Annealing |
|
Purity |
99.95% |
|
Thickness |
3mm-40mm |
|
Diameter |
50-300mm |
|
Melting point |
1857°C |
|
Density |
6.94g/cm3 |
|
Shape |
Round Disc |
|
Surface |
Polishing, Grinding |
|
Certification |
ISO9001 |
Application
Zirconium Metal Sputter Target is widely used in microelectronics, the semiconductor manufacturing industry (preparation of gate electrodes and metal interconnect layers), the aerospace industry (high-temperature components and structural materials), the optical and optoelectronic industry (high-quality optical films), and the Zirconium Metal Sputter Target. The nuclear energy field (fuel cladding materials and control rod materials for nuclear reactors), the medical field (target parts of X-ray tubes), mechanical manufacturing tools (wear-resistant coatings) decorative supplies (decorative aesthetic coatings), and other industries.
Process
Our company produces High Purity Zirconium Targets through powder pressing, high-temperature furnace melting, mold casting, repeated rolling, surface polishing treatment, strict quality control, and other processes. The purity and uniformity of the target are in line with the requirements of high-tech applications.
1. Powder metallurgy (common process)
Powdering: Sponge zirconium is made into zirconium powder by mechanical crushing, hydrogenation-dehydrogenation (HDH) and other methods.
Pressing: The target blank is obtained by cold isostatic pressing or compression molding in a mold.
Sintering: High-temperature sintering in a vacuum or inert atmosphere to improve density.
2. Melting and casting method (applicable to large-sized targets)
Vacuum arc melting: Sponge zirconium or zirconium blocks are melted in a vacuum arc furnace to remove gas impurities and cast into ingots.
Forging and rolling: The ingots are hot forged and cold rolled to improve the grain orientation and process them into the desired shape.
3. Machining and surface treatment
Cut into specified sizes, and the surface is ground and polished to reduce roughness and avoid surface defects affecting sputtering uniformity.
4. Comprehensive quality inspection and packaging
Films sputtered by Zirconium Z702 Sputter Target can be divided into the following categories:
1. Zirconium nitride (ZrN)
Color: Golden yellow
Formation mechanism: The zirconium target is sputtered in a nitrogen environment to generate a zirconium nitride (ZrN) coating. The golden color of ZrN mainly comes from the light reflection characteristics of its crystal structure.
Application: ZrN coating has the characteristics of high hardness, good wear resistance, and corrosion resistance, and is often used in decorative coatings, cutting tools, and molds.
2. Zirconium carbonitride (ZrCN)
Color: Deep black
Formation mechanism: Sputtering zirconium targets in a mixed atmosphere of nitrogen and methane to generate a zirconium carbonitride (ZrCN) coating. Increasing the carbon content makes the coating color change to deep black while improving its hardness and wear resistance.
Application: ZrCN coating is used for high-performance cutting tools and wear-resistant mechanical parts, providing excellent wear and corrosion resistance.
3. Zirconium oxide (ZrO₂)
Color: transparent or white
Formation mechanism: PVD coating is carried out in an oxygen environment to form a zirconium oxide (ZrO₂) coating. ZrO₂ has excellent thermal stability and electrical insulation properties.
Application: ZrO₂ coating is widely used in high-temperature environments, electronic devices, and medical ceramics.
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Why choose us
globalist
We have established long-term cooperation with many international logistics companies, such as DHL, UPS, FedEx, or SF Express, and can deliver products to customers on time by land or air transportation.
24-Hour Response Service
Upon receiving customer inquiries, we promptly and accurately ascertain the product they require, ensuring there are no issues related to time differences. Our customer service team operates around the clock, ensuring that no matter where our customers are located, they receive the same level of attention and service.
Excellent Customized Services
We can customize production to match the customer's drawings, and we are also capable of designing and processing in accordance with the customer's requirements. Whether it's a unique design or specific technical specifications, we are dedicated to delivering exactly what our customers envision.
Competitive prices
Our product prices are lower than other suppliers in Europe and America, and the product quality is not inferior. We can also accept minimum order quantities.
Professional equipment and team
We have a professional technical team and are equipped with advanced production equipment such as vacuum furnaces, CNC machine tools, rolling mills, etc. You can trust our product quality and processing technology.
High-Quality After-Sales
If you have any questions after receiving the product, please feel free to contact us. We will provide the best after-sales solution for customers based on the actual situation, and we can also give you a discount on your next order.


Case

Zirconium 702 Round Sputtering Target, Zirconium Target To the Netherlands
At the beginning of January, we achieved a breakthrough in our cooperation with Dutch customers on target products. Dutch customers have previously ordered our tungsten and molybdenum products and are very familiar with our product quality and service attitude. We are very happy and honored to be chosen as the supplier of zirconium sputtering targets this time. Our company has over 20 years of professional experience in the sales and production of metal targets and has obtained ISO9001 quality certification, striving to maintain high standards of quality control. The zirconium target produced by our company undergoes powder pressing, high-temperature furnace smelting, mold casting, repeated rolling, surface polishing, and strict quality control, ensuring that the purity and uniformity of the target meet the requirements of high-tech applications.
Qualification

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