1. Purity
The purity of the titanium target has a great influence on the properties of sputtered films. The higher the purity of the target, the less impurity element particles in the sputtered film, and the better the film performance (such as corrosion resistance, optical and electrical properties). In practical applications, the purity requirements of titanium targets for different purposes are different. . For example, the purity requirements of targets for general decorative coatings are not demanding, while targets for integrated circuits, display bodies and other fields have much higher requirements for purity, generally around 99.999% or above.
2. Average grain size
Usually the titanium target has a polycrystalline structure, and the grain size can range from microns to millimeters. The sputtering rate of the fine-sized grain target is faster than that of the coarse-grained target. The thickness distribution of the spray deposited film is also relatively uniform. The average grain size of titanium targets for integrated circuits is generally required to be within 30 μm, and the average grain size of ultrafine-grained titanium targets is below 10 μm.
3. Crystal orientation
Titanium has a close-packed hexagonal structure. During sputtering, titanium target atoms are easily sputtered along the direction of the hexagonal arrangement of atoms. Therefore, in order to achieve the highest sputtering rate, it is possible to increase the sputtering rate by changing the crystal structure of the target. sputtering rate. The crystallization direction of the titanium target also has a great influence on the thickness uniformity of the sputtered film layer, and the film size of the flat display and decorative coating is relatively thick, so the requirements for the grain orientation of the corresponding titanium target are relatively low.
4. Geometry and size
It is mainly reflected in the processing accuracy and processing quality, such as processing size, surface flatness, roughness, etc. Small thickness will affect the service life of the target; too rough sealing surface and sealing groove will cause vacuum problems after the target is installed; roughening the sputtering surface of the target can make the surface of the target full of protruding tips , under the action of the tip effect, the potential of these raised tips will be greatly increased, thereby breaking down the dielectric discharge. However, an excessively large protrusion is detrimental to the quality and stability of sputtering.
Our company can provide titanium alloys such as Titanium Aluminum Sputter Targets and Titanium Ti Sputtering Target, as well as titanium targets of different purity and shape, and also accept customized services. If necessary, please contact us by email.
